Reliability Prediction of Highly Scaled MOSFET Devices via Fractal Structure of Spatial Defects

Seong Joon Kim, Man Soo Kim, Suk Joo Bae. Reliability Prediction of Highly Scaled MOSFET Devices via Fractal Structure of Spatial Defects. IEEE Access, 7:143160-143168, 2019. [doi]

Abstract

Abstract is missing.