Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing

Dongil Kim, Pilsung Kang, Sungzoon Cho, Hyoungjoo Lee, Seungyong Doh. Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing. Expert Syst. Appl., 39(4):4075-4083, 2012. [doi]

Abstract

Abstract is missing.