Reliability improvement by the suppression of keyhole generation in W-plug vias

Jong-Hun Kim, Kyosun Kim, Seok Hee Jeon, Jong-Tae Park. Reliability improvement by the suppression of keyhole generation in W-plug vias. Microelectronics Reliability, 45(9-11):1455-1458, 2005. [doi]

Authors

Jong-Hun Kim

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Kyosun Kim

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Seok Hee Jeon

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Jong-Tae Park

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