10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Jeong Nyeon Kim, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-McKinstry, Richard L. Tutwiler, Judith A. Todd. 10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization. Sensors, 20(15):4335, 2020. [doi]

@article{KimLJCTTT20,
  title = {10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization},
  author = {Jeong Nyeon Kim and Tianning Liu and Thomas N. Jackson and Kyusun Choi and Susan Trolier-McKinstry and Richard L. Tutwiler and Judith A. Todd},
  year = {2020},
  doi = {10.3390/s20154335},
  url = {https://doi.org/10.3390/s20154335},
  researchr = {https://researchr.org/publication/KimLJCTTT20},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {20},
  number = {15},
  pages = {4335},
}