10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Jeong Nyeon Kim, Tianning Liu, Thomas N. Jackson, Kyusun Choi, Susan Trolier-McKinstry, Richard L. Tutwiler, Judith A. Todd. 10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization. Sensors, 20(15):4335, 2020. [doi]

Abstract

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