DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab

Chunggyeom Kim, Jinhyuk Lee, Raehyun Kim, Youngbin Park, Jaewoo Kang. DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab. Inf. Sci., 457-458:1-11, 2018. [doi]

Abstract

Abstract is missing.