Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications

Kihyun Kim, Yeonsu Lee, Ignacio Llamas-Garro, Jung-Mu Kim. Fabrication of Vertical MEMS Actuator with Hollow Square Electrode for SPR Sensing Applications. Sensors, 22(23):9490, 2022. [doi]

Abstract

Abstract is missing.