Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics

Si-Jun Kim, Sang Ho Lee, Ye-Bin You, Young Seok Lee, In-Ho Seong, Chul-Hee Cho, Jang Jae Lee, Shin-Jae You. Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics. Sensors, 22(15):5487, 2022. [doi]

Abstract

Abstract is missing.