On the Consequences of Un-Modeled Dynamics to the Optimality of Schedules in Clustered Photolithography Tools

Hyeong-Ook Kim, Se-Hyeon Park, Jung Yeon Park, James R. Morrison. On the Consequences of Un-Modeled Dynamics to the Optimality of Schedules in Clustered Photolithography Tools. In 2019 Winter Simulation Conference, WSC 2019, National Harbor, MD, USA, December 8-11, 2019. pages 2224-2235, IEEE, 2019. [doi]

Abstract

Abstract is missing.