Hansoo Kim, Jonghun Park, SugJe Sohn, Ying Wang, Spyros A. Reveliotis, Chen Zhou, Douglas A. Bodner, Leon F. McGinnis. A high-fidelity, web-based simulator for 300 mm wafer fabs. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: "e-Systems and e-Man for Cybernetics in Cyberspace", Tucson, Arizona, USA, 7-10 October 2001. pages 1288-1293, IEEE, 2001. [doi]
@inproceedings{KimPSWRZBM01,
title = {A high-fidelity, web-based simulator for 300 mm wafer fabs},
author = {Hansoo Kim and Jonghun Park and SugJe Sohn and Ying Wang and Spyros A. Reveliotis and Chen Zhou and Douglas A. Bodner and Leon F. McGinnis},
year = {2001},
doi = {10.1109/ICSMC.2001.973098},
url = {https://doi.org/10.1109/ICSMC.2001.973098},
researchr = {https://researchr.org/publication/KimPSWRZBM01},
cites = {0},
citedby = {0},
pages = {1288-1293},
booktitle = {Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: "e-Systems and e-Man for Cybernetics in Cyberspace", Tucson, Arizona, USA, 7-10 October 2001},
publisher = {IEEE},
isbn = {0-7803-7087-2},
}