Hansoo Kim, Jonghun Park, SugJe Sohn, Ying Wang, Spyros A. Reveliotis, Chen Zhou, Douglas A. Bodner, Leon F. McGinnis. A high-fidelity, web-based simulator for 300 mm wafer fabs. In Proceedings of the IEEE International Conference on Systems, Man & Cybernetics: "e-Systems and e-Man for Cybernetics in Cyberspace", Tucson, Arizona, USA, 7-10 October 2001. pages 1288-1293, IEEE, 2001. [doi]
Abstract is missing.