Jihyun Kim, Sanghyeok Seo, Sung-Shick Kim. Neural Networks Fusion to Overlay Control System for Lithography Process. In Abdul Sattar, Byeong Ho Kang, editors, AI 2006: Advances in Artificial Intelligence, 19th Australian Joint Conference on Artificial Intelligence, Hobart, Australia, December 4-8, 2006, Proceedings. Volume 4304 of Lecture Notes in Computer Science, pages 587-596, Springer, 2006. [doi]
Abstract is missing.