Detection of early-life failures in high-K metal-gate transistors and ultra low-K inter-metal dielectrics - researchr publication authors

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Young Moon Kim, Jun Seomun, Hyung-Ock Kim, Kyung Tae Do, Jung Yun Choi, Kee Sup Kim, Matthias Sauer, Bernd Becker, Subhasish Mitra. Detection of early-life failures in high-K metal-gate transistors and ultra low-K inter-metal dielectrics. In Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013. pages 1-4, IEEE, 2013. [doi]

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