Detection of early-life failures in high-K metal-gate transistors and ultra low-K inter-metal dielectrics

Young Moon Kim, Jun Seomun, Hyung-Ock Kim, Kyung Tae Do, Jung Yun Choi, Kee Sup Kim, Matthias Sauer, Bernd Becker, Subhasish Mitra. Detection of early-life failures in high-K metal-gate transistors and ultra low-K inter-metal dielectrics. In Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013. pages 1-4, IEEE, 2013. [doi]

@inproceedings{KimSKDCKSBM13,
  title = {Detection of early-life failures in high-K metal-gate transistors and ultra low-K inter-metal dielectrics},
  author = {Young Moon Kim and Jun Seomun and Hyung-Ock Kim and Kyung Tae Do and Jung Yun Choi and Kee Sup Kim and Matthias Sauer and Bernd Becker and Subhasish Mitra},
  year = {2013},
  doi = {10.1109/CICC.2013.6658544},
  url = {http://dx.doi.org/10.1109/CICC.2013.6658544},
  researchr = {https://researchr.org/publication/KimSKDCKSBM13},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {Proceedings of the IEEE 2013 Custom Integrated Circuits Conference, San Jose, CA, USA, September 22-25, 2013},
  publisher = {IEEE},
}