Voice coil motor nano stage with an eddy current damper

Yongdae Kim, Byounguk Sohn, Woosub Youm, Jongkyu Jung, Jonghyun Lee, Kyihwan Park. Voice coil motor nano stage with an eddy current damper. In 10th International Conference on Control, Automation, Robotics and Vision, ICARCV 2008, Hanoi, Vietnam, 17-20 December 2008, Proceedings. pages 1714-1717, IEEE, 2008. [doi]

Abstract

Abstract is missing.