Feedback Control of Cluster Tools: Stability Against Random Time Disruptions

Chulhan Kim, Tae-Sun Yu, Tae-Eog Lee. Feedback Control of Cluster Tools: Stability Against Random Time Disruptions. IEEE T. Automation Science and Engineering, 19(3):2008-2015, 2022. [doi]

Authors

Chulhan Kim

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Tae-Sun Yu

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Tae-Eog Lee

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