Chulhan Kim, Tae-Sun Yu, Tae-Eog Lee. Feedback Control of Cluster Tools: Stability Against Random Time Disruptions. IEEE T. Automation Science and Engineering, 19(3):2008-2015, 2022. [doi]
@article{KimYL22,
title = {Feedback Control of Cluster Tools: Stability Against Random Time Disruptions},
author = {Chulhan Kim and Tae-Sun Yu and Tae-Eog Lee},
year = {2022},
doi = {10.1109/TASE.2021.3070346},
url = {https://doi.org/10.1109/TASE.2021.3070346},
researchr = {https://researchr.org/publication/KimYL22},
cites = {0},
citedby = {0},
journal = {IEEE T. Automation Science and Engineering},
volume = {19},
number = {3},
pages = {2008-2015},
}