Hyeong-Gyun Kim, Hee-Seung Yoon, Ji Hyun Yoo, Hyun-Il Yoon, Seung-Soo Han. Development of Predictive Maintenance Technology for Wafer Transfer Robot using Clustering Algorithm. In International Conference on Electronics, Information, and Communication, ICEIC 2019, Auckland, New Zealand, January 22-25, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.