Evaluation Method Applying Fourier Transform Analysis for Conditioned Polishing Pad Surface Topography

Keiichi Kimura, Panart Khajornrungruang, Takahisa Okuzono, Keisuke Suzuki. Evaluation Method Applying Fourier Transform Analysis for Conditioned Polishing Pad Surface Topography. IJAT, 5(2):173-178, 2011. [doi]

Authors

Keiichi Kimura

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Panart Khajornrungruang

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Takahisa Okuzono

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Keisuke Suzuki

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