Keiichi Kimura, Panart Khajornrungruang, Takahisa Okuzono, Keisuke Suzuki. Evaluation Method Applying Fourier Transform Analysis for Conditioned Polishing Pad Surface Topography. IJAT, 5(2):173-178, 2011. [doi]
@article{KimuraKOS11,
title = {Evaluation Method Applying Fourier Transform Analysis for Conditioned Polishing Pad Surface Topography},
author = {Keiichi Kimura and Panart Khajornrungruang and Takahisa Okuzono and Keisuke Suzuki},
year = {2011},
doi = {10.20965/ijat.2011.p0173},
url = {http://dx.doi.org/10.20965/ijat.2011.p0173},
researchr = {https://researchr.org/publication/KimuraKOS11},
cites = {0},
citedby = {0},
journal = {IJAT},
volume = {5},
number = {2},
pages = {173-178},
}