Defective Wafer Detection Using Sensed Numerical Features

Kotcharat Kitchat, Ching-Yu Lin, Min-Te Sun. Defective Wafer Detection Using Sensed Numerical Features. In 2021 IEEE International Conference on Omni-Layer Intelligent Systems, COINS 2021, Barcelona, Spain, August 23-25, 2021. pages 1-6, IEEE, 2021. [doi]

Authors

Kotcharat Kitchat

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Ching-Yu Lin

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Min-Te Sun

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