Jenny Klaus, Roman Paris, Ralf Sommer. Systematic MEMS ASIC design flow using the example of an acceleration sensor. In 13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design, SMACD 2016, Lisbon, Portugal, June 27-30, 2016. pages 1-4, IEEE, 2016. [doi]
Abstract is missing.