Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Martin Kleindienst, Stefan Koch 0002, Markus Reichhartinger. Model-based Temperature Control of a Continuous Flow Heater for Efficient Processing of Silicon Wafers. In 2020 IEEE Conference on Control Technology and Applications, CCTA 2020, Montreal, QC, Canada, August 24-26, 2020. pages 1-6, IEEE, 2020. [doi]

This author has not been identified. Look up 'Martin Kleindienst' in GoogleThis author has not been identified. Look up 'Stefan Koch 0002' in GoogleThis author has not been identified. Look up 'Markus Reichhartinger' in Google

runs on WebDSL