Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

Andreas Klemmt, Sven Horn, Gerald Weigert, Thomas Hielscher. Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2041-2049, WSC, 2008. [doi]

This author has not been identified. Look up 'Andreas Klemmt' in GoogleThis author has not been identified. Look up 'Sven Horn' in GoogleThis author has not been identified. Look up 'Gerald Weigert' in GoogleThis author has not been identified. Look up 'Thomas Hielscher' in Google

runs on WebDSL