Andreas Klemmt, Sven Horn, Gerald Weigert, Thomas Hielscher. Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing. In Scott J. Mason, Raymond R. Hill, Lars Mönch, Oliver Rose, Thomas Jefferson, John W. Fowler, editors, Proceedings of the 2008 Winter Simulation Conference, Global Gateway to Discovery, WSC 2008, InterContinental Hotel, Miami, Florida, USA, December 7-10, 2008. pages 2041-2049, WSC, 2008. [doi]
Abstract is missing.