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Degradation behavior in upstream/downstream via test structures

Jörg Kludt, Kirsten Weide-Zaage, Markus Ackermann, Verena Hein, Christian Kovács. Degradation behavior in upstream/downstream via test structures. Microelectronics Reliability, 54(9-10):1724-1728, 2014. [doi]

Authors

Jörg Kludt

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Kirsten Weide-Zaage

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Markus Ackermann

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Verena Hein

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Christian Kovács

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