Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average

Hyo-Heon Ko, Jihyun Kim, Sang-Hoon Park, Jun-Geol Baek, Sung-Shick Kim. Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average. J. Intelligent Manufacturing, 23(3):443-455, 2012. [doi]

Authors

Hyo-Heon Ko

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Jihyun Kim

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Sang-Hoon Park

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Jun-Geol Baek

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Sung-Shick Kim

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