Hyo-Heon Ko, Jihyun Kim, Sang-Hoon Park, Jun-Geol Baek, Sung-Shick Kim. Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average. J. Intelligent Manufacturing, 23(3):443-455, 2012. [doi]
@article{KoKPBK12,
title = {Advanced semiconductor fabrication process control using dual filter exponentially weighted moving average},
author = {Hyo-Heon Ko and Jihyun Kim and Sang-Hoon Park and Jun-Geol Baek and Sung-Shick Kim},
year = {2012},
doi = {10.1007/s10845-010-0383-6},
url = {http://dx.doi.org/10.1007/s10845-010-0383-6},
researchr = {https://researchr.org/publication/KoKPBK12},
cites = {0},
citedby = {0},
journal = {J. Intelligent Manufacturing},
volume = {23},
number = {3},
pages = {443-455},
}