Nobuhiko P. Kobayashi, R. Stanley Williams. Two-stage Atomic Layer Deposition of Smooth Aluminum Oxide on Hydrophobic Self-assembled Monolayers. Engineering Letters, 16(2):225-230, 2008. [doi]
@article{KobayashiW08,
title = {Two-stage Atomic Layer Deposition of Smooth Aluminum Oxide on Hydrophobic Self-assembled Monolayers},
author = {Nobuhiko P. Kobayashi and R. Stanley Williams},
year = {2008},
url = {http://www.engineeringletters.com/issues_v16/issue_2/EL_16_2_07.pdf},
researchr = {https://researchr.org/publication/KobayashiW08},
cites = {0},
citedby = {0},
journal = {Engineering Letters},
volume = {16},
number = {2},
pages = {225-230},
}