Two-stage Atomic Layer Deposition of Smooth Aluminum Oxide on Hydrophobic Self-assembled Monolayers

Nobuhiko P. Kobayashi, R. Stanley Williams. Two-stage Atomic Layer Deposition of Smooth Aluminum Oxide on Hydrophobic Self-assembled Monolayers. Engineering Letters, 16(2):225-230, 2008. [doi]

Abstract

Abstract is missing.