Robert Kohn, Daniel Noack, Marcin Mosinski, Zhugen Zhou, Oliver Rose. Evaluation of Modeling, Simulation and Optimization Approaches for Work Flow Management in Semiconductor Manufacturing. In Ann Dunkin, Ricki G. Ingalls, Enver Yücesan, Manuel D. Rossetti, Ray Hill, Björn Johansson, editors, Proceedings of the 2009 Winter Simulation Conference, WSC 2009, Hilton Austin Hotel, Austin, TX, USA, December 13-16, 2009. pages 1592-1600, WSC, 2009. [doi]
Abstract is missing.