Robert Kohn, Oliver Rose. Automated generation of analytical process time models for cluster tools in semiconductor manufacturing. In S. Jain, Roy R. Creasey Jr., Jan Himmelspach, K. Preston White, Michael C. Fu, editors, Winter Simulation Conference 2011, WSC'11, Phoenix, AZ, USA, December 11-14, 2011. pages 1808-1820, WSC, 2011. [doi]
Abstract is missing.