Yuting Kong, Dong Ni. A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits. In 13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017. pages 744-749, IEEE, 2017. [doi]
@inproceedings{KongN17,
title = {A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits},
author = {Yuting Kong and Dong Ni},
year = {2017},
doi = {10.1109/COASE.2017.8256193},
url = {https://doi.org/10.1109/COASE.2017.8256193},
researchr = {https://researchr.org/publication/KongN17},
cites = {0},
citedby = {0},
pages = {744-749},
booktitle = {13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017},
publisher = {IEEE},
isbn = {978-1-5090-6781-7},
}