A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits - researchr publication

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Yuting Kong, Dong Ni. A practical yield prediction approach using inline defect metrology data for system-on-chip integrated circuits. In 13th IEEE Conference on Automation Science and Engineering, CASE 2017, Xi'an, China, August 20-23, 2017. pages 744-749, IEEE, 2017. [doi]

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