A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology - researchr publication authors

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Toshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi. A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

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