Toshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi. A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
@inproceedings{KonishiSMYSMT16,
title = {A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology},
author = {Toshifumi Konishi and Teruaki Safu and Katsuyuki Machida and Daisuke Yamane and Masato Sone and Kazuya Masu and Hiroshi Toshiyoshi},
year = {2016},
doi = {10.1109/ICSENS.2016.7808793},
url = {https://doi.org/10.1109/ICSENS.2016.7808793},
researchr = {https://researchr.org/publication/KonishiSMYSMT16},
cites = {0},
citedby = {0},
pages = {1-3},
booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
publisher = {IEEE},
isbn = {978-1-4799-8287-5},
}