Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control - researchr publication authors

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Junmo Koo, Daegeun Ha, Damdae Park, Hyun-Joon Roh, Sangwon Ryu, Gon-Ho Kim, Kye Hyun Baek, Chonghun Han. Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control. Computers & Chemical Engineering, 100:38-47, 2017. [doi]

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