Junmo Koo, Daegeun Ha, Damdae Park, Hyun-Joon Roh, Sangwon Ryu, Gon-Ho Kim, Kye Hyun Baek, Chonghun Han. Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control. Computers & Chemical Engineering, 100:38-47, 2017. [doi]
Abstract is missing.