A Hierarchical Approach to Qualification Management in wafer fabs

Denny Kopp, Lars Mönch. A Hierarchical Approach to Qualification Management in wafer fabs. In 2018 Winter Simulation Conference, WSC 2018, Gothenburg, Sweden, December 9-12, 2018. pages 3514-3525, IEEE, 2018. [doi]

Abstract

Abstract is missing.