A single-mass self-resonating closed-loop capacitive MEMS accelerometer

Talha Kose, Yunus Terzioglu, Kivanç Azgin, Tayfun Akin. A single-mass self-resonating closed-loop capacitive MEMS accelerometer. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

@inproceedings{KoseTAA16,
  title = {A single-mass self-resonating closed-loop capacitive MEMS accelerometer},
  author = {Talha Kose and Yunus Terzioglu and Kivanç Azgin and Tayfun Akin},
  year = {2016},
  doi = {10.1109/ICSENS.2016.7808711},
  url = {https://doi.org/10.1109/ICSENS.2016.7808711},
  researchr = {https://researchr.org/publication/KoseTAA16},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  publisher = {IEEE},
  isbn = {978-1-4799-8287-5},
}