Talha Kose, Yunus Terzioglu, Kivanç Azgin, Tayfun Akin. A single-mass self-resonating closed-loop capacitive MEMS accelerometer. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]
Abstract is missing.