A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization

Hidetoshi Kotera, Taku Hirasawa, Sasatoshi Senga, Susumu Shima. A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization. In Mateo Valero, Kazuki Joe, Masaru Kitsuregawa, Hidehiko Tanaka, editors, High Performance Computing, Third International Symposium, ISHPC 2000, Tokyo, Japan, October 16-18, 2000. Proceedings. Volume 1940 of Lecture Notes in Computer Science, pages 573-584, Springer, 2000. [doi]

Abstract

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