Gerolf Kotte, Klaus Kabitzsch. Monitoring in semiconductor manufacturing: A contribution to diagnosis in complex computer systems. In 5th European Control Conference, ECC 1999, Karlsruhe, Germany, August 31 - September 3, 1999. pages 2154-2159, IEEE, 1999. [doi]
@inproceedings{KotteK99,
title = {Monitoring in semiconductor manufacturing: A contribution to diagnosis in complex computer systems},
author = {Gerolf Kotte and Klaus Kabitzsch},
year = {1999},
doi = {10.23919/ECC.1999.7099638},
url = {https://doi.org/10.23919/ECC.1999.7099638},
researchr = {https://researchr.org/publication/KotteK99},
cites = {0},
citedby = {0},
pages = {2154-2159},
booktitle = {5th European Control Conference, ECC 1999, Karlsruhe, Germany, August 31 - September 3, 1999},
publisher = {IEEE},
isbn = {978-3-9524173-5-5},
}