Dielectric charging phenomena in diamond films used in RF MEMS capacitive switches: The effect of film thickness

Matroni Koutsoureli, A. Zevgolatis, S. Saada, C. Mer-Calfati, Loukas Michalas, George J. Papaioannou, P. Bergonzo. Dielectric charging phenomena in diamond films used in RF MEMS capacitive switches: The effect of film thickness. Microelectronics Reliability, 64:660-664, 2016. [doi]

Abstract

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