Transportation of cm-sized solid substrate by laser

K. Koyoshi, K. Sadakane, T. Kenmotsu, K. Yoshikawa. Transportation of cm-sized solid substrate by laser. In 2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015, Nagoya, Japan, November 23-25, 2015. pages 1-4, IEEE, 2015. [doi]

Authors

K. Koyoshi

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K. Sadakane

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T. Kenmotsu

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K. Yoshikawa

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