Coordinate measurement on wafer level - From single sensors to sensor arrays

T. Krah, A. Wedmann, K. Kniel, F. Hartig, N. Ferreira, Stephanus Büttgenbach. Coordinate measurement on wafer level - From single sensors to sensor arrays. In Seventh International Conference on Sensing Technology, ICST 2013, Wellington, New Zealand, December 3-5, 2013. pages 612-617, IEEE, 2013. [doi]

Abstract

Abstract is missing.