Optimizations of Double Titanium Nitride Thermo-Optic Phase-Shifter Heaters Using SOI Technology

Eylon Eliyahu Krause, Dror Malka. Optimizations of Double Titanium Nitride Thermo-Optic Phase-Shifter Heaters Using SOI Technology. Sensors, 23(20):8587, October 2023. [doi]

Abstract

Abstract is missing.