Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler-Bernoulli Beam Theory

Maximilian Krey, Bernd Hähnlein, Katja Tonisch, Stefan Krischok, Hannes Töpfer. Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler-Bernoulli Beam Theory. Sensors, 20(4):1001, 2020. [doi]

Abstract

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