Florian Krohs, Sergej Fatikow. Novel high-resolution sidewall imaging using standard Atomic Force Microscopy equipment: Exceeding surface scanning using customized FIB-milled AFM tips in torsional feedback mode. In Seventh International Conference on Sensing Technology, ICST 2013, Wellington, New Zealand, December 3-5, 2013. pages 608-611, IEEE, 2013. [doi]
Abstract is missing.