Advanced MEMS and Integrated-Optic Components for Multifunctional Integrated Optical Micromachines

Roman V. Kruzelecky, Brian Wong, Jing Zou, Emile Haddad, Wes Jamroz, Arthur Yelon, Richard Beaudry, Olivier Grenier, Wanping Zheng, Linh Ngo Phong. Advanced MEMS and Integrated-Optic Components for Multifunctional Integrated Optical Micromachines. In 2004 International Conference on MEMS, NANO, and Smart Systems (ICMENS 2004), 25-27 August 2004, Banff, Alberta, Canada. pages 315-321, IEEE Computer Society, 2004. [doi]

Abstract

Abstract is missing.